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1

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Optical Microlithography XIV - 193 lithography and RELACS processing for BEOL lithography

DellaGuardia, Ronald, Petrillo, Karen E., Chen, Jia, Rabidoux, Paul, Dalton, Timothy J., Holmes, Steven J., Hadel, Linda M., Malone, K., Mahorowala, Arpan P., Greco, S., Ferguson, Richard A., Progler,

Year:

2001

Language:

english

File:

PDF, 1.34 MB

english, 2001

2

[IEEE IEEE International Electron Devices Meeting - San Francisco, CA, USA (8-11 Dec. 2002)] Digest. International Electron Devices Meeting, - A high performance 90nm SOI technology with 0.992 μm/sup 2/ 6T-SRAM cell

Khare, M., Ku, S.H., Donaton, R.A., Greco, S., Brodsky, C., Chen, X., Chou, A., DellaGuardia, R., Deshpande, S., Doris, B., Fung, S.K.H., Gabor, A., Gribelyuk, M., Holmes, S., Jamin, F.F., Lai, W.L.,

Year:

2002

Language:

english

File:

PDF, 282 KB

english, 2002

3

A new positive DUV photoresist optimized for 0.25 μm isolated lines

T. Lindsay, G.G. Barclay, M.F. Cronin, R. Dellaguardia, W. Conley, H. Ito, M. Mori, P. Hagerty, R. Sinta, T. Zydowsky, J.W. Thackeray

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 242 KB

english, 1997

4

[IEEE Proceedings of the IEEE 2004 International Interconnect Technology Conference - Burlingame, CA, USA (7-9 June 2004)] Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) - Ash-induced modification of porous and dense SiCOH inter-level-dielectric (ILD) materials during damascene plasma processing

Dalton, T.J., Fuller, N., Tweedie, C., Dunn, D., Labelle, C., Gates, S., Colburn, M., Chen, S.T., Lai, T., Dellaguardia, R., Petrarca, K., Dziobkowski, C., Kumar, K., Siddiqui, S.

Year:

2004

Language:

english

File:

PDF, 236 KB

english, 2004

5

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V - Fabrication of 64-Mb DRAM using x-ray lithography

DellaGuardia, Ronald, Wasik, Chet, Puisto, Denise M., Fair, Robert H., Liebmann, Lars W., Rocque, Janet M., Nash, Steven C., Lamberti, Angela C., Collini, George J., French, R., Vampatella, Ben R., Gi

Year:

1995

Language:

english

File:

PDF, 523 KB

english, 1995

6

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Advances in Resist Technology and Processing XIV - New ESCAP-type resist with enhanced etch resistance and its application to future DRAM and logic devices

Conley, Will, Brunsvold, William R., Buehrer, Fred, DellaGuardia, Ronald, Dobuzinsky, David, Farrell, Timothy R., Ho, Hok, Katnani, Ahmad D., Keller, Robin, Marsh, James T., Muller, Paul, Nunes, Ronal

Year:

1997

Language:

english

File:

PDF, 585 KB

english, 1997

7

All-Wet, Metal-Compatible High-Dose-Implanted Photoresist Strip

Totir, George G., Khojasteh, Mahmoud, Nunes, Ronald, Cooper, Emanuel, Kern, Matthew, van Berkel, Kim, Payne, Makonnen, Dellaguardia, Ronald, To, Bang, Maurer, Siegfried

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 1.59 MB

english, 2012

8

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Advances in Resist Technology and Processing XVI - Correlations between dissolution data and lithography of various resists

DellaGuardia, Ronald, Huang, Wu-Song, Chen, K. Rex, Kang, Doris, Conley, Will

Year:

1999

Language:

english

File:

PDF, 1.98 MB

english, 1999

9

Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers

Juan R. Maldonado, Ron DellaGuardia, Edward Babich

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 223 KB

english, 1995

10

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - BEOL lithography for early development at the 65-nm node

DellaGuardia, Ronald, Smith, Bruce W., Kwong, Ranee W., Li, Wenjie, Lawson, Peggy, Burkhardt, Martin, Grauer, Ioana C., Wu, Qiang, Angyal, M., Hichri, H., Melville, Ian, Kumar, K., Lin, Y., Holmes, St

Year:

2004

Language:

english

File:

PDF, 963 KB

english, 2004

11

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Optical Microlithography XV - 193-nm lithography and resist reflow for the BEOL

DellaGuardia, Ronald, Yen, Anthony

Year:

2002

Language:

english

File:

PDF, 632 KB

english, 2002

12

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Image shortening and process development in BEOL lithography

DellaGuardia, Ronald, Warner, Dennis J., Chen, Zheng, Stetter, Martin, Ferguson, Richard A., McGuire, Anne E., Badger, Karen D., Progler, Christopher J.

Year:

2000

Language:

english

File:

PDF, 2.41 MB

english, 2000

13

BU-05 - Infectiologue référent pour des établissements de soins privés : importance des infections associées aux soins

Roger, P., Leroux, E., Roghi, J., Dellaguardia, M., Boivin, H., Girard, D.

Journal:

Médecine et Maladies Infectieuses

Year:

2016

Language:

french

File:

PDF, 96 KB

french, 2016

14

Photoprocesses on colloidal clay systems. 3. Interaction of dodecanol and its micelles with colloidal montmorillonite

DellaGuardia, R. A., Thomas, J. K.

Journal:

Journal of Physical Chemistry

Year:

1984

Language:

english

File:

PDF, 850 KB

english, 1984

15

Radiation-Induced Reaction of Sulfur and Water

R. A. DellaGuardia and F. J. Johnston

Journal:

Radiation Research

Year:

1980

Language:

english

File:

PDF, 588 KB

english, 1980

16

ChemInform Abstract: PHOTOPROCESSES ON COLLOIDAL CLAY SYSTEMS. QUENCHING STUDIES AND THE EFFECT OF SURFACTANTS ON THE LUMINESCENT PROPERTIES OF PYRENE AND PYRENE DERIVATIVES ADSORBED ON CLAY COLLOIDS

DELLAGUARDIA, R. A., THOMAS, J. K.

Journal:

Chemischer Informationsdienst

Year:

1983

File:

PDF, 102 KB

1983

17

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Advances in Resist Technology and Processing XIX - Methods for comparing contact hole shrinking techniques with 248-nm single layer and bilayer photoresists

Petrillo, Karen E., Simons, John P., DellaGuardia, Ronald, Fedynyshyn, Theodore H.

Year:

2002

Language:

english

File:

PDF, 306 KB

english, 2002

18

X-ray transmission through low atomic number particles

R.A. DellaGuardia, D.E. Seeger, J.L. Mauer IV

Journal:

Microelectronic Engineering

Year:

1989

Language:

english

File:

PDF, 373 KB

english, 1989

19

Photoprocesses on colloidal clay systems. Tris(2,2'-bipyridinium)ruthenium(II) bound to colloidal kaolin and montmorillonite

DellaGuardia, R. A., Thomas, J. K.

Journal:

Journal of Physical Chemistry

Year:

1983

Language:

english

File:

PDF, 1.08 MB

english, 1983

20

[IEEE International Electron Devices Meeting. Technical Digest - Washington, DC, USA (2-5 Dec. 2001)] International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) - Opportunities and challenges in ultra low k dielectrics for interconnect applications

Purushothaman, S., Nitta, S.V., Ryan, J.G., Narayan, C., Krishnan, M., Cohen, S., Gates, S., Whitehair, S., Hedrick, J., Tyberg, C., Greco, S., Rodbell, K., Huang, E., Dalton, T., DellaGuardia, R., Sa

Year:

2001

Language:

english

File:

PDF, 530 KB

english, 2001

21

Reaction of cations of tetramethylbenzidine with colloidal clays

Kovar, L., DellaGuardia, R., Thomas, J. K.

Journal:

Journal of Physical Chemistry

Year:

1984

Language:

english

File:

PDF, 582 KB

english, 1984

22

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI - X-ray exposure in the manufacture of sub-150-nm gate lines

Lamberti, Angela C., Agnello, Paul D., Crabbe, Emmanuel F., DellaGuardia, Ronald, Oberschmidt, James M., Subbana, Seshu, Wu, Steve, Seeger, David E.

Year:

1996

Language:

english

File:

PDF, 534 KB

english, 1996

23

Photoprocesses on colloidal clay systems. Quenching studies and the effect of surfactants on the luminescent properties of pyrene and pyrene derivatives adsorbed on clay colloids

DellaGuardia, R. A., Thomas, J. K.

Journal:

Journal of Physical Chemistry

Year:

1983

Language:

english

File:

PDF, 1000 KB

english, 1983

24

Photoproduction of gold colloids and films

Krasnansky, R., Yamamura, S., Thomas, J. K., Dellaguardia, R.

Journal:

Year:

1991

Language:

english

File:

PDF, 645 KB

english, 1991

25

Comparison of image shortening effects in x-ray and optical lithography

Dellaguardia, R.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1994

Language:

english

File:

PDF, 737 KB

english, 1994

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